VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Indium: In(3d5) & In(3d3), BE Cu(2p3)= 932.66eV
1
0.05 eV/step, Sum of 15 repetitive etch/scans
NORM
REGULAR
1
0
0
0
0
0
1
0.05 eV/step, Sum of 15 repetitive etch/scans
Indium: In(3d5) & In(3d3), BE Cu(2p3)= 932.66eV
2003
4
28
23
27
32
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.21
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
470
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
45
4.00E-06
0
0
0
0
1202
290
25126
0.437144
0.443547
1526
0.443547
1558
0.443536
1494
0.443525
1634
0.443515
1576
0.443504
1573
0.443493
1554
0.443482
1579
0.443471
1589
0.44346
1573
0.443449
1660
0.443438
1606
0.443427
1618
0.443416
1641
0.443406
1598
0.443395
1550
0.443384
1651
0.443373
1554
0.443362
1601
0.443351
1650
0.44334
1546
0.443329
1663
0.443318
1664
0.443308
1615
0.443297
1595
0.443286
1653
0.443275
1574
0.443264
1634
0.443253
1620
0.443242
1588
0.443231
1576
0.44322
1630
0.44321
1662
0.443199
1624
0.443188
1686
0.443177
1653
0.443166
1717
0.443155
1705
0.443144
1706
0.443133
1660
0.443123
1710
0.443112
1672
0.443101
1626
0.44309
1738
0.443079
1758
0.443068
1692
0.443057
1761
0.443046
1808
0.443036
1822
0.443025
1760
0.443014
1749
0.443003
1781
0.442992
1781
0.442981
1805
0.44297
1825
0.442959
1879
0.442949
1799
0.442938
1810
0.442927
1838
0.442916
1837
0.442905
1828
0.442894
1833
0.442883
1850
0.442873
1906
0.442862
1956
0.442851
1870
0.44284
1881
0.442829
1887
0.442818
1915
0.442807
1804
0.442797
1798
0.442786
1847
0.442775
1925
0.442764
1813
0.442753
1819
0.442742
1833
0.442731
1849
0.442721
1887
0.44271
1907
0.442699
1859
0.442688
1846
0.442677
1784
0.442666
1883
0.442656
1909
0.442645
1945
0.442634
1924
0.442623
1939
0.442612
1957
0.442601
1820
0.442591
1939
0.44258
2013
0.442569
1947
0.442558
1997
0.442547
1979
0.442536
1942
0.442526
1966
0.442515
1998
0.442504
1980
0.442493
2007
0.442482
2122
0.442471
2166
0.442461
2090
0.44245
2141
0.442439
2086
0.442428
2060
0.442417
2017
0.442406
2210
0.442396
2212
0.442385
2173
0.442374
2198
0.442363
2211
0.442352
2184
0.442341
2303
0.442331
2361
0.44232
2232
0.442309
2406
0.442298
2369
0.442287
2369
0.442277
2430
0.442266
2362
0.442255
2531
0.442244
2525
0.442233
2535
0.442223
2577
0.442212
2495
0.442201
2677
0.44219
2746
0.442179
2669
0.442168
2732
0.442158
2829
0.442147
2843
0.442136
2916
0.442125
2884
0.442114
2927
0.442104
2936
0.442093
2982
0.442082
2991
0.442071
2950
0.44206
3097
0.44205
3101
0.442039
3023
0.442028
3183
0.442017
3134
0.442006
2987
0.441996
2958
0.441985
3054
0.441974
2894
0.441963
2899
0.441953
2768
0.441942
2734
0.441931
2603
0.44192
2596
0.441909
2445
0.441899
2468
0.441888
2476
0.441877
2254
0.441866
2324
0.441855
2197
0.441845
2139
0.441834
2212
0.441823
2136
0.441812
2091
0.441802
2028
0.441791
1928
0.44178
2016
0.441769
2013
0.441758
1961
0.441748
1917
0.441737
1894
0.441726
1926
0.441715
1872
0.441705
1908
0.441694
1913
0.441683
1874
0.441672
1936
0.441661
1823
0.441651
1930
0.44164
1892
0.441629
1885
0.441618
1886
0.441608
1918
0.441597
1892
0.441586
1907
0.441575
1846
0.441565
1768
0.441554
1813
0.441543
1792
0.441532
1774
0.441522
1860
0.441511
1783
0.4415
1876
0.441489
1827
0.441479
1833
0.441468
1938
0.441457
1825
0.441446
1883
0.441435
1866
0.441425
1871
0.441414
1799
0.441403
1860
0.441392
1888
0.441382
1835
0.441371
1952
0.44136
1863
0.44135
1788
0.441339
1788
0.441328
1865
0.441317
1784
0.441307
1772
0.441296
1871
0.441285
1796
0.441274
1738
0.441264
1687
0.441253
1769
0.441242
1806
0.441231
1772
0.441221
1752
0.44121
1736
0.441199
1785
0.441188
1776
0.441178
1685
0.441167
1754
0.441156
1746
0.441145
1685
0.441135
1722
0.441124
1759
0.441113
1684
0.441103
1662
0.441092
1709
0.441081
1739
0.44107
1742
0.44106
1719
0.441049
1706
0.441038
1793
0.441027
1736
0.441017
1777
0.441006
1727
0.440995
1765
0.440985
1848
0.440974
1744
0.440963
1891
0.440952
1761
0.440942
1882
0.440931
1836
0.44092
1931
0.44091
1879
0.440899
1935
0.440888
1896
0.440877
1963
0.440867
1987
0.440856
2054
0.440845
1988
0.440835
2080
0.440824
1968
0.440813
2096
0.440802
2064
0.440792
2098
0.440781
2189
0.44077
2197
0.44076
2323
0.440749
2249
0.440738
2199
0.440728
2332
0.440717
2314
0.440706
2332
0.440695
2436
0.440685
2389
0.440674
2490
0.440663
2588
0.440653
2482
0.440642
2707
0.440631
2535
0.440621
2592
0.44061
2751
0.440599
2900
0.440588
2883
0.440578
2812
0.440567
2794
0.440556
2895
0.440546
3019
0.440535
3141
0.440524
3108
0.440514
3192
0.440503
3140
0.440492
3313
0.440482
3401
0.440471
3340
0.44046
3529
0.44045
3550
0.440439
3429
0.440428
3550
0.440418
3636
0.440407
3655
0.440396
3634
0.440386
3712
0.440375
3608
0.440364
3571
0.440353
3478
0.440343
3425
0.440332
3321
0.440321
3201
0.440311
3102
0.4403
2921
0.440289
2878
0.440279
2777
0.440268
2682
0.440257
2580
0.440247
2551
0.440236
2519
0.440225
2530
0.440215
2449
0.440204
2312
0.440193
2341
0.440183
2312
0.440172
2232
0.440161
2300
0.440151
2222
0.44014
2279
0.44013
2241
0.440119
2215
0.440108
2212
0.440098
2267
0.440087
2243
0.440076
2108
0.440066
2234
0.440055
2185
0.440044
2300
0.440034
2281
0.440023
2226
0.440012
2234
0.440002
2253
0.439991
2260
0.43998
2327
0.43997
2407
0.439959
2337
0.439948
2503
0.439938
2362
0.439927
2499
0.439917
2546
0.439906
2548
0.439895
2618
0.439885
2599
0.439874
2703
0.439863
2740
0.439853
2817
0.439842
2851
0.439831
2980
0.439821
2839
0.43981
3155
0.439799
3158
0.439789
3237
0.439778
3288
0.439768
3541
0.439757
3583
0.439746
3620
0.439736
3866
0.439725
3821
0.439714
4201
0.439704
4349
0.439693
4503
0.439683
4811
0.439672
5280
0.439661
5598
0.439651
5978
0.43964
6627
0.439629
7553
0.439619
8382
0.439608
9535
0.439598
10821
0.439587
12423
0.439576
14414
0.439566
16261
0.439555
17677
0.439545
18654
0.439534
18125
0.439523
17259
0.439513
15289
0.439502
12807
0.439491
10324
0.439481
8494
0.43947
6753
0.43946
5487
0.439449
4512
0.439438
3909
0.439428
3477
0.439417
2839
0.439407
2523
0.439396
2346
0.439385
2161
0.439375
2014
0.439364
1834
0.439354
1747
0.439343
1708
0.439332
1686
0.439322
1603
0.439311
1456
0.439301
1401
0.43929
1449
0.439279
1345
0.439269
1308
0.439258
1290
0.439248
1241
0.439237
1230
0.439226
1181
0.439216
1198
0.439205
1118
0.439195
1198
0.439184
1153
0.439173
1127
0.439163
1167
0.439152
1128
0.439142
1091
0.439131
1070
0.439121
1073
0.43911
1095
0.439099
1047
0.439089
1026
0.439078
1083
0.439068
1013
0.439057
1034
0.439046
1028
0.439036
1033
0.439025
1020
0.439015
1069
0.439004
1055
0.438994
1080
0.438983
1034
0.438972
977
0.438962
997
0.438951
1046
0.438941
963
0.43893
1027
0.43892
1000
0.438909
959
0.438898
1003
0.438888
974
0.438877
1005
0.438867
976
0.438856
984
0.438846
1004
0.438835
984
0.438824
988
0.438814
1021
0.438803
1043
0.438793
1020
0.438782
1037
0.438772
1079
0.438761
1045
0.438751
1020
0.43874
998
0.438729
1033
0.438719
1063
0.438708
1082
0.438698
1065
0.438687
1037
0.438677
1107
0.438666
1144
0.438656
1098
0.438645
1155
0.438634
1139
0.438624
1126
0.438613
1068
0.438603
1145
0.438592
1170
0.438582
1230
0.438571
1154
0.438561
1186
0.43855
1263
0.43854
1314
0.438529
1239
0.438518
1268
0.438508
1317
0.438497
1317
0.438487
1326
0.438476
1334
0.438466
1326
0.438455
1413
0.438445
1381
0.438434
1466
0.438424
1492
0.438413
1545
0.438403
1480
0.438392
1574
0.438382
1566
0.438371
1496
0.43836
1737
0.43835
1770
0.438339
1828
0.438329
1777
0.438318
1866
0.438308
1937
0.438297
1953
0.438287
2043
0.438276
2133
0.438266
2114
0.438255
2339
0.438245
2292
0.438234
2405
0.438224
2459
0.438213
2539
0.438203
2662
0.438192
2865
0.438182
2971
0.438171
3176
0.438161
3270
0.43815
3401
0.438139
3642
0.438129
3961
0.438118
4104
0.438108
4608
0.438097
4896
0.438087
5365
0.438076
5962
0.438066
6450
0.438055
7239
0.438045
8046
0.438034
9151
0.438024
10584
0.438013
12186
0.438003
14322
0.437992
16362
0.437982
19275
0.437971
21867
0.437961
24051
0.43795
25126
0.43794
24923
0.437929
23115
0.437919
20503
0.437908
17380
0.437898
13962
0.437887
11096
0.437877
8726
0.437866
6861
0.437856
5440
0.437845
4549
0.437835
3863
0.437824
3205
0.437814
2706
0.437803
2350
0.437793
2108
0.437782
1896
0.437772
1709
0.437761
1509
0.437751
1410
0.437741
1320
0.43773
1194
0.43772
1162
0.437709
1068
0.437699
979
0.437688
941
0.437678
873
0.437667
803
0.437657
818
0.437646
803
0.437636
749
0.437625
718
0.437615
696
0.437604
642
0.437594
643
0.437583
637
0.437573
623
0.437562
625
0.437552
561
0.437541
558
0.437531
599
0.437521
512
0.43751
520
0.4375
469
0.437489
483
0.437479
473
0.437468
493
0.437458
447
0.437447
485
0.437437
456
0.437426
425
0.437416
436
0.437405
427
0.437395
406
0.437384
401
0.437374
392
0.437364
398
0.437353
384
0.437343
395
0.437332
385
0.437322
350
0.437311
346
0.437301
353
0.43729
355
0.43728
351
0.437269
327
0.437259
343
0.437249
365
0.437238
332
0.437228
310
0.437217
345
0.437207
353
0.437196
324
0.437186
301
0.437175
290
0.437165
305
0.437155
302
0.437144
end of experiment
